Incorporating 3D-Printed Polymer Scaffolds onto MEMS Resonant Chemical Sensors for Enhanced Performance

For Spray Coated PECH, Gyroid IP-PDMS, and Gyroid PUT, the sensitivity response to various concentrations of ethylbenzene, M-xylene, and toluene was simultaneously recorded. The sensitivity difference between two sensors with different sensing film geometry in the tested concentration range is highlighted by the relative frequency change for a 5-µm height gyroid PUT (Brown) and block PUT (Blue) as a function of the analyte concentration for ethylbenzene, M-xylene, and toluene. relative frequency change as a function of the low analyte concentration for M-xylene and toluene for a 5-µm height gyroid PUT (green) on the topside and gyroid PUT (purple) on both sides. In the tested concentration range, this plot illustrates the sensitivity difference between two sensors with distinct sensing film coating regions.针对喷涂型聚环氧氯丙烷（PECH）、螺旋结构IP-PDMS（Gyroid IP-PDMS）以及螺旋结构PUT（Gyroid PUT），本研究同步记录了其对不同浓度乙苯、间二甲苯（M-xylene）及甲苯的灵敏度响应。在测试浓度范围内，通过对比5μm高度螺旋结构PUT（棕色组）与块状PUT（蓝色组）针对乙苯、间二甲苯及甲苯的相对频率变化随分析物浓度的变化关系，突出了两种传感薄膜几何结构不同的传感器之间的灵敏度差异。针对间二甲苯与甲苯的低浓度分析物场景，该图表展示了单侧顶面为5μm高度螺旋结构PUT（绿色组）以及双侧均为螺旋结构PUT（紫色组）的传感器的相对频率变化随分析物浓度的变化关系。在本次测试的浓度范围内，该图表进一步呈现了两种传感薄膜涂布区域不同的传感器之间的灵敏度差异。