Diffractive optical element phase profiles and scanning electron microscopy images supporting parallel multiphoton polymerization fabrication strategies

This dataset contains the supporting data for the article "Optimizing multispot DOE parallelization strategies for multiphoton polymerization micro- and nanofabrication" submitted to Light: Advanced Manufacturing. The dataset includes: Scanning electron microscopy (SEM) images of micro- and nanostructures fabricated by parallel two-photon polymerization (2PP) using diffractive optical elements (DOEs). These images document the fabrication results obtained under various writing strategies (stop-and-go, on-the-fly, interleaved) and DOE configurations (on-axis binary, off-axis multilevel, non-uniform intensity profiles), using both picosecond and femtosecond laser sources. Computed DOE phase profiles used to generate multispot arrays of up to 35×35 = 1225 simultaneous foci for parallel multiphoton polymerization. These include binary-phase and multilevel designs, on-axis and off-axis configurations, as well as interleaved and non-uniform intensity layouts. All fabrication experiments were carried out at IMT Atlantique (Brest, France) using custom-built photoplotter systems and in-house fabricated DOEs. Further details on experimental conditions, optical configurations, and photoresist formulations are provided in the associated article. This work was supported by the European Union's Horizon Europe programme under grant agreement nº 101091644 (FABulous) and by the French National Research Agency (ANR) through the NANOSHAPE project (ANR-23-INDF-0003).