Supplementary materials for: "Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review"
收藏DataCite Commons2025-04-25 更新2025-05-17 收录
下载链接：
https://rdr.kuleuven.be/citation?persistentId=doi:10.48804/VZXHA9
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资源简介：
This dataset contains supplementary materials for: "Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review". More specifically, it provides (i) a document containing the full search commands used to identify records/papers, (ii) a spreadsheet of the screening results, (iii) a spreadsheet of the selected papers and their categorization results, and (iv) a BibTeX document with citations for the selected papers.
提供机构：
KU Leuven RDR
创建时间：
2024-10-10
