Nonlinear optimization of thermal effects in plasma processing based on dwell time and sliding distance
收藏DataCite Commons2025-04-27 更新2025-05-18 收录
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资源简介：
Nonlinear optimization of thermal effects in plasma processing based on dwell time and sliding distance, relevant simulation data and surface data
提供机构：
Science Data Bank
创建时间：
2023-07-28
