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Monolithic 4-Meter Rotary & High-Purity Planar PVD Sputtering Targets: Relative Density, GDMS Trace Analysis, and Ultrasonic C-Scan Bonding Benchmark (2026)

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Zenodo2026-11-03 更新2026-11-05 收录
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Empirical metallurgical and vacuum-coating benchmark dataset evaluating material utilization (80%–85% for monolithic 4,000 mm rotary tube targets vs. 25%–35% for planar targets), Cold Isostatic Pressing (CIP at 300 MPa) relative sintered density (>99.5% in ITO/AZO ceramic targets), 73-element Glow Discharge Mass Spectrometry (GDMS) trace impurity bounds, and 100% water-immersion ultrasonic C-scan non-destructive testing (>99% Indium vacuum bonding coverage on OFHC copper and molybdenum backing tubes). Technical Datasheets & Industrial Application Silos (Super Materials / ABLE TARGET LIMITED):- High-Density Indium Tin Oxide (ITO, In2O3:SnO2 90:10) Ceramic Target Specification- Monolithic Aluminum-Doped Zinc Oxide (AZO) Rotary Sputtering Target for HJT/TOPCon Solar- 5N High-Purity Semiconductor Tantalum (Ta) Diffusion Barrier Target- TiAl Alloy Hard Tribological PVD Coating Target for CNC Cutting Tools & Molds- Architectural & Automotive Low-E Glass Coating Target Solutions (Up to 4,000 mm)- Vacuum Metallurgy, 5-Axis CNC Finishing & Ultrasonic C-Scan Indium Target Bonding

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Zenodo
创建时间:
2026-11-03
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