Sapphire anti-reflection microstructure and performance dataset

This data set includes the structural parameters of anti-reflective microstructures and anti-reflective films prepared on sapphire, as well as the transmittance test, temperature rise test and beam quality factor test of the prepared samples. The influence of depth, bottom angle, period and top duty ratio of one-dimensional trapezoidal structure on transmittance is analyzed by using COMSOL software, and the process tolerance of microstructure is given. The simulation design of anti-reflection film system is carried out by using TFCalc software. After the sample preparation, the transmittance test is carried out. At the same time, in order to meet the application environment, the temperature rise of the antireflective sample under the action of high power laser is tested, and the change of the beam quality factor of the probe light passing through the sample at different temperatures is tested.