3D Point Cloud

This work introduces a breakthrough two-axis electromagnetic scanning micromirror system that resolves the fundamental aperture-frequency trade-off in MEMS-based LiDAR, achieving 20 mm optical aperture with 610 Hz resonant frequency. The design seamlessly integrates a voice coil motor (VCM) for vertical actuation with a resonant horizontal scanner. The resonant scanner is meticulously manufactured using electrical discharge machining and PCB techniques on a titanium alloy (Ti-alloy) substrate, capable of operating at a 6.7° mechanical angle with a power consumption of 327 mW at a 320 mA drive current. Furthermore, the integration of tunnel magnetoresistance (TMR) sensors facilitates closed-loop control, enhancing system accuracy and reliability. Leveraging the proposed 2D microscanner, the implemented LiDAR prototype achieves 120-line/frame scanning at a 10 Hz rate with a 100 kHz pulse repetition rate, effectively reconstructing 3D point clouds of tested targets.