An Investigation of the Scalability of a 3D Stacked Hybrid P/N Layer and Vertical Gate SOI Junctionless FET

This research examined the electrical characteristicsof a conventional junctionless silicon-on-insulator (SOI-JL) and aSOI hybrid P/N fin channel JL thin film transistor (SOI-H-JL)using a simulation with gate lengths from 60 nm to 10 nm. Theinterface location of the SOI-H-JL has a depletion region of aparallel channel, which influences the effective thickness of thechannel. The threshold voltage can be adjusted by changing theconcentration of the substrate. Better electrical characteristicsand higher transconductance can be obtained under the shortchannel when compared with the conventional SOI-JL. Althoughthe hybrid structure has better electrical characteristics, thelarger gate capacitance results in the delay time excessively longas a defect, which can be improved by thickening the raisedsource/drain area. The circuit performance is evaluated bybuilding up an inverter using aforementioned devices.