Experiment dataset for: Mapping the Effect of Substrate Temperature Inhomogeneity During Microwave Plasma-Enhanced Chemical Vapour Deposition Nanocrystalline Diamond Growth

This experimental dataset contains temperature and property mapping data of diamond films grown bty microwave plasma-enhanced chemical vapour deposition (MPECVD) Data includes: -In-situ temperature maps for several molybdenum substrate holders. -Simulated plasma density during growth for the same holders. -Raman spectroscopy maps of two polycrystalline diamond films. -Spectroscopic ellipsometry map of a thin polycrystalline diamond film.