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Repeatability and reproducibility of optical intensity measurements.

Figshare2016-02-17 更新2026-04-29 收录

数据链接：

https://figshare.com/articles/dataset/Repeatability_and_reproducibility_of_optical_intensity_measurements_/2293879 数据链接链接失效反馈

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资源简介：

Repeatability and reproducibility of optical intensity measurements.

应用场景：

创建时间：

2016-02-17

光学计量学

表面检测

Authors (publication): Sarika Soman, Roland Horsten, Silvania F. Pereira This dataset contains raw and processed experimental data and the helper functions used to support the findings in the publi

DataCite Commons2026-01-13 更新100

Data accompanying the publication: Limits of detection of defects near edges of nanostructures for coherent Fourier scatterometry

相干傅里叶散射测量

光学计量学

Authors (publication): Anubhav Paul, Silvania F. Pereira This dataset contains the simulated scan-profile data and MATLAB plotting scripts supporting the results in the SPIE publication “Limits of

DataCite Commons2026-01-27 更新70

Variation between replicate, extraction, assay run, and laboratory observed during repeatability and reproducibility studies.

测量系统分析

实验方法学

Variation between replicate, extraction, assay run, and laboratory observed during repeatability and reproducibility studies.

NIAID Data Ecosystem30

Data accompanying the publication: Limits of detection of defects near edges of nanostructures for coherent Fourier scatterometry

光学计量学

结构缺陷检测

Authors (publication): Anubhav Paul, Silvania F. Pereira This dataset contains the simulated scan-profile data and MATLAB plotting scripts supporting the results in the SPIE publication “Limits of

DataCite Commons2026-01-27 更新80

Numerical measurement errors of the seven systems when using the CMM as reference device.

测量系统分析

坐标测量机精度评估

Numerical measurement errors of the seven systems when using the CMM as reference device.

NIAID Data Ecosystem40