Raw data for manuscript "Ultrahigh-Q photonic crystal cavities in silicon rich nitride"

Dataset supports: Debnath, K. et al (2017). Ultrahigh-Q photonic crystal cavities in silicon rich nitride. Optics Express, 25(22), 27334-27340.Ultrahigh-Q Photonic Crystal cavities were realized in a suspended Silicon Rich Nitride (SiNx) platform for applications at telecom wavelengths. Using a line width modulated cavity design we achieved a simulated Q of 520,000. The fabricated cavities were measured using the resonance scattering technique and we demonstrated a measured Q of 120,000. From the experimental spectra at different input power, we also show that the non-linear losses are negligible in this material platform.