CHIPS Metrology Ontology

The CHIPS Metrology Ontology originated from a pragmatic desire to understand how the various research entities under the CHIPS Metrology described by the Seven Grand challenges (https://doi.org/10.6028/nist.chips.1000), are related to each other. The named classes within this ontology came from the data management plans and adjacent documents associated with the projects within the Severn Grand Challenges. The class hierarchy was mainly assembled by June Lau. Ontological fine-tuning was advised by Alden Dima, and occasionally with the aid of a large language model. We used the Provenance Ontology (https://www.w3.org/TR/prov-o/) as a base framework, while pre-populating certain classes, particularly around the materials science domain and electron microscopy application) with the Platform DigitalMaterial Core Ontology (https://doi.org/10.1016/j.matdes.2023.112603) and their Electron Microscopy Application Ontology (https://doi.org/10.1007/s40192-024-00378-y).