Dataset accompanying the publication: "Scanning in coherent Fourier scatterometry using Fresnel zone plate projection on a digital micro-mirror device"

<strong>Title:</strong> Dataset for “Scanning in Coherent Fourier Scatterometry Using Fresnel Zone Plate Projection on a Digital Micromirror Device”<strong>Authors (publication):</strong> Sarika Soman, Eren Özdemir, Silvania F. Pereira<br>This dataset contains raw and processed experimental data used to support the findings in the publication “<em>Scanning in coherent Fourier scatterometry using Fresnel zone plate projection on a digital micro-mirror device</em>.” The data was collected as part of a study on high-speed, non-mechanical beam scanning for optical metrology applications. It includes coherent Fourier scatterometry (CFS) measurements of calibration gratings, focal plane intensity distributions, optical aberration characterisation, and particle detection scans, along with scripts used for data processing, step-size calibration, and wavefront optimisation. The dataset is organised to ensure reproducibility and reuse, and can be applied to related research in nanoscale surface inspection, adaptive optics, and programmable illumination.<br>

<strong>标题：</strong>《基于数字微镜器件（Digital Micromirror Device, DMD）的菲涅尔波带片（Fresnel Zone Plate, FZP）投影相干傅里叶散射（Coherent Fourier Scatterometry, CFS）扫描》配套数据集<br><strong>发表论文作者：</strong>Sarika Soman、Eren Özdemir、Silvania F. Pereira<br>本数据集包含支撑上述发表论文研究结论的原始与处理后实验数据，该数据源于一项面向光学计量应用的高速非机械光束扫描研究项目。数据集涵盖校准光栅的相干傅里叶散射测量数据、焦平面光强分布数据、光学像差表征数据与粒子探测扫描数据，同时附带用于数据处理、步长校准与波前优化的脚本文件。本数据集的组织形式兼顾可复现性与复用性，可应用于纳米尺度表面检测、自适应光学以及可编程照明等相关研究领域。