Resonant x-ray scattering at the Ta L-III edge and Co K-edge for quantum applications

We aim to use resonant x-ray scattering at the Co K-edge (7708 eV) and Ta L-III edge (9980 eV) to isolate the signal and position of Co and Ta in a complex material stack. By acquiring CD-GISAXS pattern at various energy across each edge, we will track the variation in the scattering signal. Since the variation in scattering will mainly come from either the Co or the Ta, we will be able to reconstruct with precision the in-depth stack of material and identify the driving mechanism, such as element migration and so on, during the different stage of the material process.