Data of the PhD Thesis: "Exploring the quality factor limits of room temperature nanomechanical resonators"

This dataset contains all the data supporting the PhD thesis "Exploring the quality factor limits of room temperature nanomechanical resonators" from TU Delft, the Netherlands. The thesis aims at studying the limits of nanomechanical resonators' quality factor at room temperature. It revolves around four main facets, addressing limitations in fabrication techniques, design strategies, exploring the impact of aspect ratio on quality factor enhancement, and investigating the potential for temperature sensing. A digital version of the thesis can be found online at https://repository.tudelft.nl<br>

本数据集包含支撑荷兰代尔夫特理工大学（TU Delft）博士论文《室温纳米机械谐振子品质因数极限探索》的全部相关数据。该论文旨在研究室温环境下纳米机械谐振子的品质因数极限，其研究涵盖四大核心方向：分别为制备工艺的局限性分析、优化设计策略探究、长宽比对品质因数提升的影响研究，以及温度传感应用潜力的考察。该论文的数字版本可于https://repository.tudelft.nl在线获取。