Dataset of latest developments in EUV photoresist evaluation capability at SSRF
收藏科学数据银行2023-11-24 更新2026-04-23 收录
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https://www.scidb.cn/detail?dataSetId=1c4c7b41eca54126be17b6b7781b1fb4
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资源简介：
The 08U1B beamline at SSRF provides the experimental platform for EUV photoresist evaluation,The performance of the transmission grating mask and the vibration control in the interference lithography experiment impact the quality of the interference fringe.Here, we present the original diffraction efficiency data simulated using Gsolver software, the original characterization images of fabricated transmission-grating-mask , the HP-15 nm original image produced through interference lithography experiment, and the beamline vibration data.
提供机构：
University of Chinese Academy of Sciences; Renzhong Tai; Beining Li; Shuming Yang; Zhidi Lei; Yanqing Wu; Shanghai Institute of Applied Physics; Shijie Zhu; Zhenjiang Li; Shanghai Synchrotron Radiation Facility; Chenghang Qi
创建时间：
2023-11-24
