Enhancing Film Bulk Acoustic Resonators Performance by Optimizing AlN Seed Layer Crystallinity and Polarity Alignment
收藏Figshare2026-03-03 更新2026-04-28 收录
下载链接：
https://figshare.com/articles/dataset/Enhancing_Film_Bulk_Acoustic_Resonators_Performance_by_Optimizing_AlN_Seed_Layer_Crystallinity_and_Polarity_Alignment/30876629
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资源简介：
This dataset contains the minimum source data supporting the findings of this study, including results from material parameter calculations, thin-film characterization, and device performance measurements.
创建时间：
2026-03-03
