Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
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Full data set for the article: Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS Jyotish Patidar, Amit Sharma, Siarhei Zhuk, Giacomo Lorenzin, Claudia Cancellieri,Martin F. Sarott, Morgan Trassin, Kerstin Thorwarth, Johann Michler, Sebastian Siol Surface & Coatings Technology 468 (2023) 129719 https://doi.org/10.1016/j.surfcoat.2023.129719.
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2025-04-02
