Experimental data and code for Fractional Vortex Contrast Microscopy

This dataset contains the experimental data supporting the study of High-Sensitivity Fractional Vortex Contrast Microscopy (FVCM) for label-free detection and characterization of deep-subwavelength nanostructures. The dataset includes raw experimental measurements and processed imaging results obtained using fractional vortex illumination and differential fractional vortex contrast microscopy (D-FVCM). The dataset is organized into six categories: 1. 10AuBeads:Experimental images of approximately 10 nm gold nanoparticles acquired using D-FVCM, demonstrating high-sensitivity detection of plasmonic nanoparticles. 2. 25nmData:Experimental data of sub-25 nm dielectric nanostructures, including SiO₂ nanodots with dimensions approaching the deep-subwavelength regime. 3. 25nm-Gap&Bridge defects:Imaging data of nanoscale semiconductor defects, including approximately 25 nm gap and bridge defects on patterned silicon nanowire structures. These data demonstrate defect detection and polarity identification using D-FVCM. 4. 50-400nmScaling:Size-dependent response measurements of nanostructures with dimensions ranging from 50 nm to 400 nm, used to characterize the scaling behavior and detection capability of FVCM. 5. IndustrialSample:Experimental data acquired from industrial semiconductor samples containing complex microstructures and nanoscale defects, demonstrating the large dynamic range imaging capability of FVCM. 6. Si-SiC_sample:Three-dimensional imaging data of Si-on-SiC samples, demonstrating volumetric defect detection capability in semiconductor structures. 7. Biospecimens:Label-free imaging data of mouse colorectal tissue sections and mesenchymal stromal cells, demonstrating enhanced visualization of tissue architecture, cellular boundaries, and subcellular structures using FVCM. All datasets include the corresponding raw images and processed results used for quantitative analysis. These data enable reproduction and further development of fractional vortex contrast microscopy for high-sensitivity optical inspection, nanometrology, and semiconductor defect characterization.