Data for: Hydrogen existence state of a hydrogenated amorphous carbon coating and its thermal stability

This attatched file includes all raw data (plots) about the Raman shift, infrared light absorption, H distribution from ERDA and chemeical structure evolution of the a-C:H coatings during annealing.本附件文件包含了退火过程中氢化非晶碳（a-C:H）涂层的拉曼位移（Raman shift）、红外光吸收（infrared light absorption）、弹性反冲探测分析（ERDA）所得氢分布以及化学结构演化的全部原始数据（图谱）。