Supplementary Materials for: Ultracompact angle-resolved metasurface spectrometer

In the main text, we have demonstrated the ultracompact spectrometer array for angle-resolved spectral analysis. The system is realized by placing miniaturized spectrometer array at the back focal plane of a metalens. As a result, the conventional meter-scale optical instruments have been compressed to several hundred micrometers, enabling the applications in integrated systems, point-of-care diagnostics, and consumer electronics etc. Here we show the detailed information about the methods, metasurface, photodetector, and spectrometer array.在正文中，我们已展示了用于角分辨光谱分析的超紧凑光谱仪阵列（ultracompact spectrometer array）。该系统通过将微型光谱仪阵列放置在超透镜（metalens）的后焦平面上得以实现。由此，传统的米级光学仪器已被压缩至数百微米尺度，可应用于集成系统、即时诊断（point-of-care diagnostics）以及消费电子等领域。本文在此提供关于实验方法、超表面（metasurface）、光电探测器以及光谱仪阵列的详细信息。