A48

Sample ID A48 of the Surface Topography Challenge

Measurement 1:
The surfaces were measured using White Light Interferometry (WLI; MFT-5000, Rtec). The sample was analyzed directly after unpacking without further cleaning procedure.
Five positions of the sample (in the middle = P1, top right corner =P2, bottom right corner = P3, bottom left corner = P4, and top left corner = P5) were analyzed with different magnifications (10x, 20x, 50x). The positions P1-5 at the different magnifications are not identical.
*.bcrf, *.enc, *.info and *.png files were exported as raw-data of the measurement with the WLI from R-tec.
The *.bcrf file was then further processed using Mountain®9, whereby tilt and curvature were removed. Furthermore, the surface roughness parameters (S-values) were evaluated in accordance to ISO 25178 without filter.
Finally, the *.mnt files and *.pdf report files were exported

Measurement 2:
The surfaces were measured using White Light Interferometry (WLI;Profilm3D®, Filmmetrics). The sample was analyzed directly after unpacking without further cleaning procedure.
The WLI was calibrated by the Filmetrics step-height standard SHS-16278.
One position per sample was analyzed with a magnification of 10x.
*.fibcs, *.fibps, *.stl, *.sur and *.txt files were exported as raw-data of the measurement with the WLI from Filmmetrics.

表面形貌挑战赛（Surface Topography Challenge）的A48号样本

测量1：
采用白光干涉仪（White Light Interferometry，WLI；型号MFT-5000，Rtec公司）对样本表面进行表征。样本开箱后直接开展检测，未进行额外清洗工序。
选取样本的五个位置（中心区域记为P1、右上角记为P2、右下角记为P3、左下角记为P4、左上角记为P5），分别采用10×、20×、50×三种不同放大倍率进行测量。需注意：不同放大倍率下对应的P1至P5位置并非完全重合。
从R-tec公司的白光干涉仪测量原始数据中，导出了*.bcrf、*.enc、*.info及*.png格式文件。随后使用Mountain®9软件对*.bcrf格式文件进行后处理，去除了表面的倾斜与曲率误差。同时依据ISO 25178国际标准，未施加滤波处理直接评估了表面粗糙度参数（S值）。最终导出*.mnt格式文件与*.pdf格式检测报告。

测量2：
采用白光干涉仪（White Light Interferometry，WLI；Profilm3D®，Filmmetrics公司）对样本表面进行表征。样本开箱后直接开展检测，未进行额外清洗工序。
该白光干涉仪已使用Filmetrics台阶高度标准样品SHS-16278完成校准。每个样本选取一个位置，采用10×放大倍率进行测量。
从Filmetrics公司的白光干涉仪测量原始数据中，导出了*.fibcs、*.fibps、*.stl、*.sur及*.txt格式文件。

搜集汇总

背景与挑战

背景概述

A48数据集是一个表面形貌测量数据集，包含16个不同位置和放大倍数的白光干涉仪测量结果，数据经过ISO 25178标准处理并包含多种文件格式。该数据集属于实验数据类别，由Max Marian于2025年发布。