Patent AT-393333-B: [Translated] ION PROJECTION DEVICE FOR SHADOW PROJECTION
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An ion-projecting apparatus which has between the ion source and the mask, directly proximal to the mask, at least one ion optical correction element in the form of a...
一种离子投射装置,在其离子源(ion source)与掩模(mask)之间且紧邻掩模的位置处,设有至少一个呈……形式的离子光学校正元件(ion optical correction element)



