Dataset for manuscript titled "Plasma characterization for reactive HiPIMS process regulation of vanadium oxides"
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资源简介：
Original dataset for figures in both the manuscript and the supplementary files. Fig.S7-QO2 increase and Fig. S7-QO2 decrease has errors in data. Since it was found out late after the publication, the correct data is now uploaded at: https://zenodo.org/records/20558035.
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Zenodo创建时间：
2026-02-17
