University of California Riverside (UCR) Time-Series Classification Archive
收藏arXiv2025-09-30 收录
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https://www.timeseriesclassification.com/description.php?Dataset=Wafer
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资源简介：
该数据集是一个开放的集合，包含了半导体制造蚀刻过程中使用的六个传感器数值，旨在评估时间序列分类算法。该数据集不仅包括射频功率、腔体压力和排放值等传感器数据，还用于比较通用的时间序列分类算法。数据集总共包含7,164个序列，其中异常数据占10.6%，其任务是进行时间序列分类。
This is an open dataset containing six sets of sensor readings collected during semiconductor manufacturing etching processes, designed to evaluate time series classification algorithms. It encompasses sensor data such as radio frequency (RF) power, chamber pressure, and emission readings, and can be used to benchmark general-purpose time series classification algorithms. In total, the dataset contains 7,164 sequences, with anomalous data accounting for 10.6% of the total, and its targeted task is time series classification.
提供机构：
University of California Riverside
