Interpretation of the group standard： <italic>Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source</italic>

With the rapid development of China's semiconductor manufacturing industry， including electronic chips， rapidly grows towards self-sufficiency， the demand for ultrapure water in electronic-grade applications is increasing significantly. However， China faces severe water scarcity issues， making it increasingly challenging to meet the demand for ultrapure water production. The utilization of reclaimed water in the preparation of electronic-grade ultrapure water has emerged as an important solution， which is also a significant development direction for advanced international enterprises and being increasingly practiced in China. However， the water quality requirements for electronic-grade ultrapure water are extremely stringent. Currently， there is a lack of water quality standards for reclaimed water used as this water source. This poses challenges such as incomplete water quality indicators， undefined limits， and difficulties in providing standardized guidance for the utilization of reclaimed water in the electronics manufacturing industry. The Guidelines for Water Reuse-Electronic Grade Ultrapure Water Source（T/CSES 122—2023） aims to establish a classification system for such reclaimed water and to define its corresponding water quality indicators， limit values， treatment requirements， and management methods. Its formulation and implementation are of significant importance for standardizing and guiding the utilization of reclaimed water in producing electronic-grade ultrapure water. Moreover， it provides essential standards and technical support for promoting the resuse of wastewater in industry field.