Data Repository: Direct electron beam writing of silver using a β-diketonate precursor: first insights

Summary

The data is contained in a single zip file with the two main folders: "Tungsten_SEM_deposition" and "FESEM_deposition". 

The folder "Tungsten_SEM_deposition" contains all used data from deposition experiments in the Hitachi S3600 tungsten filament scanning electron microscope (SEM) using the precursor (hfac)AgPMe3 with the home-built gas-injection system.

The folder "FESEM_deposition" contains all used data from deposition in the Zeiss Crossbeam 340 KMAT using the field emitter scanning electron microscope (FESEM) capability of the dual beam instrument using the precursor (hfac)AgPMe3 with the commercial gas-injection system (Kleindiek).

In each folder all raw SEM images related to these experiments are provided. In addition all pattern files and the most important data on the microstructural characterization using transmission electron microscopy (TEM) and energy-dispersive X-ray (EDX) spectroscopy are provided and indicated be the corresponding folder names.

Folder structure: "Tungsten_SEM_deposition"

1)   KH157_new_Si_Ag_hfacAgTMP_deposition: images of the deposition experiment taken in the tungesten filament microscope

2)   KH157_Si_Ag_hfacAgTMP_HRSEM: high-resolution images taken in the field emitter scanning electron microscope Hitachi S-4800

3)   KH157_new_Si_Ag_hfacAgTMP_EDX_10kV: elemental analyses done in the field emitter microscope Hitachi S-4800 using an EDAX Genesis 4000 detector and 10 kV acceleration voltage

4)   KH157_new_Si_Ag_hfacAgTMP_EDX 2022-09 15mm: elemental analyses done in the field emitter microscope Hitachi S-4800 using an EDAX Genesis 4000 detector using 5 kV and 7 kV acceleration voltage

5)   KH157 - Pillar structure in cross-section: imaging and cross-sectioning done in a Tescan Lyra dual beam instrument plus elemental analysis done in a Tescan Mira FESEM equipped with an EDAX EDX system

6)   KH157_Si_Ag_hfacAgTMP_TEM: data related to transmission electron microscopy studies done in a ThermoFischer Themis 200 G3 microscope

7)   pattern_Katja_Hoeflich_Aug2022: pattern and design files used for automation of the patterning with the Xenos patterning software

Folder structure: "FESEM_deposition"

1)   FESEM_deposition_Si: images of the deposition experiment in the field emitter dual beam instrument

2)   FESEM_deposition_TEM_grid: data related to the tranmission electron microscopy studies done in a ThermoFischer Themis 200 G3 microscope for deposition directly onto a TEM grid

3)   pattern: pattern files for patterning carried out using the SmartFIB software