Raw ptychography data for manuscript with title 'Structured Illumination Ptychography and At-wavelength Characterization with an EUV diffuser at 13.5 nm Wavelength'

- Given are the HDF files containing the raw diffraction patterns
- Although some meta-data might be available in these files, these might not be correct. The following data were used for reconstruction:
    wavelength: 13.5 nm
    distance sample <-> detector: ~29.2 mm
    sCMOS pixel size: 11 um
    Number of incoherent modes: 4
    Initial probe guess: 9 um
    For the reconstruction, OPR was used (Although it might have not been necessary for all data. However, to have comparable results it was used for each reconstruction)
- For each scenario, there are two data sets to calculate the Fourier ring correlation (FRC)
- For the analysis of the diffuser the reconstructed probe of the data set "dp_diffuser_max_dynam_range.hdf5" was used

- Data were measured at the Institute of Applied Physics in Jena using a Fiber Laser driven High-order harmonic source

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