Raw ptychography data for manuscript with title 'Structured Illumination Ptychography and At-wavelength Characterization with an EUV diffuser at 13.5 nm Wavelength'

- Given are the HDF files containing the raw diffraction patterns - Although some meta-data might be available in these files, these might not be correct. The following data were used for reconstruction: wavelength: 13.5 nm distance sample <-> detector: ~29.2 mm sCMOS pixel size: 11 um Number of incoherent modes: 4 Initial probe guess: 9 um For the reconstruction, OPR was used (Although it might have not been necessary for all data. However, to have comparable results it was used for each reconstruction) - For each scenario, there are two data sets to calculate the Fourier ring correlation (FRC) - For the analysis of the diffuser the reconstructed probe of the data set "dp_diffuser_max_dynam_range.hdf5" was used - Data were measured at the Institute of Applied Physics in Jena using a Fiber Laser driven High-order harmonic source Please contact me ([e-mail]) for additional support.