25 nm-Feature, 104>-Aspect-Ratio, 10 mm2>-Area Single-Pulsed Laser Nanolithography

Name: 25 nm-Feature, 104>-Aspect-Ratio, 10 mm2>-Area Single-Pulsed Laser Nanolithography
Creator: figshare
Published: 2025-08-13 07:03:09
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DataCite Commons2025-08-13 更新2025-09-08 收录

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https://springernature.figshare.com/articles/dataset/25_nm-Feature_10_4_-Aspect-Ratio_10_mm_2_-Area_Single-Pulsed_Laser_Nanolithography/29351579/1

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2025-08-13

25 nm-Feature, 104&gt;-Aspect-Ratio, 10 mm2&gt;-Area Single-Pulsed Laser Nanolithography

25 nm-Feature, 104>-Aspect-Ratio, 10 mm2>-Area Single-Pulsed Laser Nanolithography