Comparative analysis of depositions of graphene oxide films by ultrasonic and conventional spray

ABSTRACT The spray technique for thin film deposition stands out for its versatility, simplicity and efficiency. In this work, two different spray techniques, conventional and ultrasonic, were used for the production of graphene oxide films, the first one was an industrial equipment for ultrasonic spray production and the second, an adaptation performed with an airbrush, a solenoid, a circuit electric and a program in C ++ language, called conventional spray. The films obtained were characterized with respect to thickness, electrical resistivity, transmittance and morphology. The samples produced by the conventional method presented thicknesses and transmittances more suitable for electronic applications, since the smaller sheet resistances were obtained by the ultrasonic spray method. The morphology of the films shows a better uniformity for the samples obtained by means of the ultrasonic spray technique. The comparative analysis of the results indicated that the conventional spray equipment, although much simpler and low cost, was able to achieve results as satisfactory as those obtained in an industrial ultrasonic spray equipment. The great advantage of the industrial equipment is the possibility of producing several samples simultaneously, while the conventional spray adapted has the benefit of speed, deposition possibility with larger graphene oxide sheets and accessibility of the production and operation of the system.摘要 薄膜沉积喷雾技术以其多功能性、简便性与高效性脱颖而出。本研究采用传统喷雾与超声喷雾两种不同的喷雾工艺制备氧化石墨烯薄膜（graphene oxide films）：其中超声喷雾所用设备为工业级超声喷雾生产装置，而传统喷雾所用装置则由喷笔、电磁阀、电路及C++语言编写的程序改装搭建而成。对所制备的薄膜分别从厚度、电阻率、透光率及形貌四个维度进行了表征。传统工艺制备的样品，其厚度与透光率更适配电子应用场景；而超声喷雾工艺所得样品的方阻（sheet resistances）更低。超声喷雾工艺制备的薄膜样品，其形貌均匀性更佳。结果对比分析表明，尽管传统喷雾装置结构更简便、成本更低，但其制备效果可媲美工业级超声喷雾装置。工业级超声喷雾装置的显著优势在于可同时批量制备多组样品；而改装式传统喷雾装置的优势则在于制备速度更快、可沉积尺寸更大的氧化石墨烯片层，且系统的搭建与操作更便捷。