Study of buried interfaces in Si//Si assemblies
收藏DataCite Commons2024-05-22 更新2025-04-15 收录
下载链接：
https://doi.esrf.fr/10.15151/ESRF-ES-1682136576
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资源简介：
The purpose of this experiment is to benchmark the new high-throughput XRR setup on the GMT instrument with a series of measurements of buried interfaces in direct bonded Si wafers
提供机构：
European Synchrotron Radiation Facility
创建时间：
2024-05-22
