Dataset for an Interlaboratory Comparison of On-Wafer S-Parameter Measurements up to 1.1 THz

Summary:The dataset contains measured S-parameters supporting an interlaboratory measurement comparison involving on-wafer S-parameter measurements from 10 GHz to 1.1 THz. The dataset supports the following paper: F. A. Mubarak et al., "An Interlaboratory Comparison of On-Wafer S-Parameter Measurements up to 1.1 THz," IEEE Transactions on Terahertz Science and Technology, vol. 15, no. 3, pp. 344-358, May 2025, doi: 10.1109/TTHZ.2025.3537461 Seven laboratories were involved, and each participant has measured an individual reference substrate fabricated from a high-resistivity silicon wafer in the same batch. One and two-port co-planar waveguide (CPW) structures were designed, simulated, and fabricated. The measurements from 10 GHz to 1.1 THz, extending across six frequency bands, are conducted using different equipment in terms of vendors and specifications. The dataset contains *.MAT files (MATLAB binary files version 5) with measured S-parameters of various 1-port (matched load, open) and 2-port (2x attenuator, 2x mismatched line, filter) devices. The frequency lists for particular set-ups are stored in the file freq_lists.mat. Further details can be found in the paper cited above. The file names contain following institution shortcuts:FBH - Ferdinand-Braun-Institut, GermanyKEY - Keysight, BelgiumCH - Chalmers University of Technology, SwedenLIL - University of Lille, FranceFF - FormFactor, United KingdomPTB - Physikalisch-Technische Bundesanstalt, GermanyNPL - National Physical Laboratory, United Kingdom The meaning of file prefixes:coax - coaxial measurementsWR1_5 - waveguide WR1.5 (band 500 GHz - 750 GHz)WR1 - waveguide WR1 (band 750 GHz to 1.1 THz)WR2 - waveguide WR2 (band 325 GHz to 500 GHz)WR3 - waveguide WR3 (band 220 GHz - 325 GHz)WR5 - waveguide WR5 (band 140 GHz - 220 GHz) DOI: 10.5281/zenodo.23042690 Title:Dataset for an Interlaboratory Comparison of On-Wafer S-Parameter Measurements up to 1.1 THz Creators:Faisal Ali Mubarak (VSL, The Netherlands, ORCID 0000-0003-4774-9038)Gia Ngoc Phung (Physikalisch-Technische Bundesanstalt, Germany, ORCID 0000-0001-7157-1263)Uwe Arz (Physikalisch-Technische Bundesanstalt, Germany, ORCID 0000-0003-0372-2626)Kamel Haddadi (University of Lille CNRS, France, ORCID 0000-0002-4857-5220)Isabelle Roch-Jeune (University of Lille CNRS, France, ORCID 0000-0002-4443-8894)Guillaume Ducournau (University of Lille CNRS, France, ORCID 0000-0002-9171-4767)Thomas Flisgen (Brandenburg University of Technology (BTU), Germany, ORCID 0000-0001-8547-5838)Ralf Doerner (Ferdinand-Braun-Institut (FBH), Germany, ORCID 0000-0001-5284-6858)Djamel Allal (LNE, France, ORCID 0000-0001-6907-2414)Divya Jayasankar (RISE Research Institutes of Sweden, ORCID 0000-0002-5726-327X)Jan Stake (Chalmers University of Technology, ORCID 0000-0002-8204-7894)Robin Schmidt (Keysight, Belgium, ORCID 0000-0001-9416-2999)Gavin Fisher (FormFactor, Germany)Nick Ridler (National Physical Laboratory, UK, ORCID 0000-0002-1462-2914)Xiaobang Shang (National Physical Laboratory, UK, ORCID 0000-0002-0298-4184) License:CC-BY 4.0 International Keywords:Calibration, comparison, coplanar waveguides (CPWs), on-wafer, S-parameter measurements, terahertz metrology Classification:INSPEC B7140 – Microwave measurementsINSPEC B7230 – Calibration and metrology techniquesINSPEC B1265 – Network analysis and scattering parametersINSPEC B5340 – Waveguides and transmission lines (CPW)INSPEC B2430 – Microwave/millimeter-wave and THz techniques Project title:On-wafer microwave metrology for future industrial applications (OnMicro) Funder:European Commission Funder ID:10.13039/100019599Grant number: Partnership 23IND10 OnMicro Link to project homepage:https://www.ptb.de/epm2023/onmicro/home Software: The files can be viewed or imported with the Mathworks MATLAB (https://www.mathworks.com). Open source alternatives: SciPy (https://scipy.org/) library for Python programming language or GNU Octave (https://octave.org/).