Improving electrical properties and thermal stability of Al-doped ZnO transparent conducting oxide by a ZnO cap layer

The data provide information about the crystallinity of ZnO deposited on Al-doped ZnO, and their optical transmittance.本数据集提供了沉积于掺铝氧化锌（Al-doped ZnO）衬底上的氧化锌（ZnO）的结晶度及其光学透过率相关信息。