Data for Phys. Rev. Acc. Beams submission by F. Braun, F. Brockner, D. Lützenkirchen-Hecht. "Impact of Thermal Annealing on Stress, Morphology, and Field Emission of NbTiN Thin Films"
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This file contains experimental data for the figures in the manuscript "Impact of Thermal Annealing on Stress, Morphology, and Field Emission of NbTiN Thin Films". The data support the findings in the manuscript and is meant for reviewing and documentation prposes.
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2025-12-18



