Dataset for: In situ patterning of hierarchical nanoporous gold structures by in-plane dealloying

We developed an in situ method to generate nanoporous gold structures during dealloying. We fabricated a film stack using direct current sputtering deposition for each layer onto a clean silicon surface. We tested the method both with and without an adhesion layer. For the adhesion layer 5 nm of chromium and 100 nm of gold was first deposited, and then a 90 nm alloy layer and 20 nm chromium top layer. Two experiments tested different alloy compositions: Ag82.5Au17.5 and Ag72Au28. A pattern was etched into the top chromium layer. The sample was then submerged into concentrated nitric acid to initiate dealloying. This dataset reports the dealloying distance over time for gold alloys Au 17.5 and Au 28 both with and without the adhesion layer. Surface enhanced Raman spectroscopy was used to characterize the plasmonic substrate. This dataset includes the typical Raman signal of benzenethiol. This dataset is associated with the paper Zhao, F., Zeng, J., Santos, G. M., & Shih, W. C. (2015). In situ patterning of hierarchical nanoporous gold structures by in-plane dealloying. Materials Science and Engineering: B, 194, 34–40. doi:10.1016/j.mseb.2014.12.016.本研究开发了一种在脱合金过程中原位制备纳米多孔金结构的方法。我们采用直流溅射沉积法，在洁净硅基底表面逐层制备薄膜堆叠结构，并分别针对带有粘附层与无粘附层的两种方案开展测试。对于带有粘附层的样品，首先依次沉积5 nm铬层与100 nm金层，随后沉积90 nm合金层与20 nm铬顶层。两组实验分别采用两种不同的合金组分：Ag82.5Au17.5与Ag72Au28。随后在顶层铬层上刻蚀出图案，再将样品浸入浓硝酸中以启动脱合金反应。本数据集记录了带有粘附层与无粘附层的两种金合金（Au占比17.5%与28%）的脱合金距离随时间的变化情况。本研究采用表面增强拉曼光谱（Surface Enhanced Raman Spectroscopy）对该等离子体基底进行表征，数据集包含苯硫酚的典型拉曼信号。本数据集关联的学术论文为：Zhao, F., Zeng, J., Santos, G. M., & Shih, W. C. (2015). In situ patterning of hierarchical nanoporous gold structures by in-plane dealloying. Materials Science and Engineering: B, 194, 34–40. DOI: 10.1016/j.mseb.2014.12.016.