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The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency

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doi.org2025-01-22 收录
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http://doi.org/10.17632/6xpd59sgkv.1
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资源简介:
1. This code is written as.f90 which can be compiled with OneAPI of Intel or other compilers. 2. The elements of the L-Type circuit are included in the file of "LTypeExternalCircuit.f90". 3. The voltage of rf power can be changed in the file of "FieldBoundary.f90". 4. The time and space step can be changed in the file of "ControlFlow.f90" 5. The initial density, the total simulation time can be controlled by changing those parameter values in "input/ControlFlow.txt" 6. The gas pressure and the initial temperature can be changed in the file "input/gas.txt". 7. The content of the part of the output data has been described in the file named "Description.txt" in "1DPICMCCLTypeECBreakdown(clean2) - Data.zip"

此代码以.f90格式编写,可使用英特尔OneAPI或其他编译器进行编译。 L型电路的元素包含于名为"LTypeExternalCircuit.f90"的文件中。 射频功率的电压可在"FieldBoundary.f90"文件中进行调整。 时间步长和空间步长可在"ControlFlow.f90"文件中进行修改。 通过调整"input/ControlFlow.txt"中的参数值,可以控制初始密度以及总仿真时间。 气体压力和初始温度可在"input/gas.txt"文件中进行更改。 输出数据部分的内容已在"1DPICMCCLTypeECBreakdown(clean2) - Data.zip"中的名为"Description.txt"的文件中进行了描述。
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