The effect of oxygen admixture on the properties of microwave generated plasma in Ar-O₂ - data set

This work presents the datasets of the results of a self-consistent modelling analysis on microwave plasma generated in Ar-O₂ mixtures at a frequency of 2.45 GHz at atmospheric pressure. The study focuses on how the plasma properties are in uenced by the increase of the oxygen fraction in the gas mixture. The oxygen admixture is increased from 1 up to 95 % in mass for values of the input microwave power of 1 and 1.5 kW. The results show that for a power of 1 kW and gradually increasing the oxygen admixture from 1 to 25 % the electron density drops by a factor of more than 4 due to the energy lost by the electrons due to dissociation of oxygen molecules and the gas heating. An analysis of the number densities of species produced in the Ar-O₂ plasma is presented. Oxygen admixtures of above 50 % are considered along with an increase of the input microwave power in order to supply the discharge with electron number density values of the order of 10^19 m^-3. Gas temperatures above 3700 K are obtained in the plasma core along with a strong production of oxygen atoms with a number density of the order of 10^23 m^-3.