SRIM simulation data underlying the PhD thesis "Quantum sensing and fabrication of color centers in diamond: Toward a quantum biosensor based on CMOS-integrated NV centers"

SRIM simulation data for <strong>ion implantation</strong> into a diamond substrate. SRIM is a simulation software for the interaction of ions incident on a material substrate, very useful in the context of ion implantation. These simulations were performed prior to the cleanroom processing of a diamond substrate, in order to determine the optimal processing and implantation parameters. This diamond substrate is used as part of the underlying PhD project and is ultimately integrated with CMOS technology into a compact quantum diamond biosensor. The data resulting from the simulations is acquired by running different ion-target material combinations, using TRIM (a sub-module of SRIM).The data is in the form of .PNG, .TXT, .BMP, .SAV.

本数据集为面向金刚石衬底离子注入（ion implantation）的SRIM模拟数据。SRIM是一款用于模拟离子入射至材料衬底相互作用过程的仿真软件，在离子注入场景中具备极高应用价值。本次模拟工作于金刚石衬底洁净室工艺开展前完成，旨在确定最优的工艺与注入参数。该金刚石衬底隶属于本博士阶段研究项目，最终将与CMOS技术结合，集成至紧凑型量子金刚石生物传感器中。本次模拟所得数据通过配置多组离子-靶材组合，并调用SRIM的子模块TRIM获取。数据集文件格式涵盖.PNG、.TXT、.BMP及.SAV。