Data for: Energetic particle irradiation study of TiN coatings

This dataset presents the experimental parameters to ensure the reproducibility of this research work: 1. The ion beam parameters of the MIAMI-2 facility for 134 keV Xe irradiation at 473 K. 2. The parameters of the magnetron sputtering deposition of the TiN thin films. 3. The spreadsheet for fluence-to-dpa conversion. 4. The analysis of Xe bubbles sizes at up to 6.2 dpa. 5. The high-resolution and processed TEM, STEM-EDX HAADF, EFTEM micrographs for future comparison and reference.