A method for precise measurement of the dispersion energy at distances below 50nm

The data were used for precise measurements of adhesion energy between contacting Si and Ru rough surfaces. Information for interpretation of the data can be found in:
A. V. Postnikov, I. V. Uvarov, and V. B. Svetovoy, Measurement of the adhesion energy between Si and Au caused by dispersion forces, Phys. Rev. B 111, 085420 (2025).

Folder AFM contains AFM scans in format WSxM. The files Ru_hot_# provide information on surface roughness of Ru film of 50nm thick, magnetron sputtered on Si substrate at 400° C in 3 different locations. Files Si_tip_# made on the working surface of the tip of the cantilever in 5 different locations.

Folder Interferometer contains PicoScope files for the left and right edges of the cantilever above the substrate. Each file includes two interferograms: one when the laser beam is moving from the adhered end to the fixed end of the cantilever and one when the beam is moving in the opposite direction.

本数据集用于精准测量接触态硅（Si）与钌（Ru）粗糙表面间的粘附能。相关数据解读信息可参见如下文献：
A. V. 波斯特尼科夫、I. V. 乌瓦罗夫及V. B. 斯韦托沃伊，《由色散力引起的硅（Si）与金（Au）粘附能的测量》，发表于《物理评论B（Physical Review B）》111卷，085420 (2025)。

AFM文件夹内存储WSxM格式的原子力显微镜（Atomic Force Microscope, AFM）扫描数据：Ru_hot_#系列文件记录了50纳米厚钌（Ru）薄膜的表面粗糙度信息，该薄膜于400℃环境下通过磁控溅射工艺沉积于硅（Si）衬底上，共采集3个不同位置的样本数据；Si_tip_#系列文件则采集了悬臂梁探针工作表面的相关数据，共完成5个不同位置的测量。

干涉仪（Interferometer）文件夹内存储有衬底上方悬臂梁左右边缘的PicoScope数据文件。每个文件均包含两组干涉图：一组对应激光束从悬臂梁粘附端向固定端移动的过程，另一组对应激光束沿相反方向移动的过程。