Research data for Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

Name: Research data for Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes
Creator: Zenodo
Published: 2025-04-17T13:46:15+08:00

Zenodo2025-04-17 更新2026-05-26 收录

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https://zenodo.org/doi/10.5281/zenodo.15236258 数据链接链接失效反馈

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资源简介：

This folder contains data supporting the paper "Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes", DOI: 10.1116/6.0003497, published in the Journal of Vacuum Science and Technology A the15/5/2024

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Zenodo

创建时间：

2025-04-17

Research data for Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

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