Research Advances in Deposition Technologies for 13.5 nm Curved Multilayer Optics
收藏DataCite Commons2025-09-19 更新2026-05-05 收录
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The samples were prepared by DC magnetron sputtering. X-ray reflectivity (XRR) measurements were conducted using a Panalytical Empyrean X-ray diffractometer with Cu-Kα radiation (λ = 0.154 nm). Spectral tests were performed at the BL08B Metrology Beamline Station of the Hefei National Synchrotron Radiation Laboratory.
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2025-09-19
