Full dataset of the article: Robust local thickness estimation of sub-micrometer specimen by 4D-STEM

Datasets were taken for q4STEM method evaluation (quantitative 4D STEM). It enables in-situ local thickness estimation of amorphous electron transparent samples such as lamellas used in TEM tomography. They are named by the used detector (direct detection STEM; ligth conversion STEM) and the sample (ultrathin section of lung tissue; latex beads; FIB milled stepped lamella - epoxy resin).

本数据集用于q4STEM（quantitative 4D STEM，定量四维扫描透射电子显微镜）方法的性能评估。该方法可实现非晶电子透明样品的原位局部厚度估算，例如透射电子显微镜（Transmission Electron Microscopy, TEM）断层成像所用的试样薄片。数据集根据所采用的探测器类型（直接探测型扫描透射电子显微镜（direct detection STEM）、光转换型扫描透射电子显微镜（light conversion STEM））以及试样类型（肺组织超薄切片、乳胶微球、聚焦离子束（Focused Ion Beam, FIB）刻蚀的阶梯状环氧树脂试样薄片）进行命名。