EDDIE - Energy Dispersive x-rays spectroscopy for areal Density and composItion Evaluation

EDDIE is a MATLAB code for the for the evaluation of thin lms mass thick-
ness and composition based on the Energy Dispersive X-Ray Spectroscopy
(EDS). The method exploits the theoretical calculation of the in-depth char-
acteristic X-ray generation distribution function in multilayer sam-
ples, by the numerical solution of the electron trans-
port equation. Once the substrate composition in known, this method gives
reliable measurements without the need of a reference sample and/or mul-
tiple voltage acquisitions. The electron transport model is derived from the
Boltzmann transport equation and it exploits the most updated and reli-
able physical parameters in order to obtain an accurate description of the
phenomenon.