A collection of common semiconductor dataset from hyperspectral imaging in reflection geometry
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Spectral data of semiconductor wafers from hyperspectral imaging in reflection geometry. The spectral data covers from VNIR (400 - 2500 nm), MWIR (2700 - 5300 nm), and LWIR (7600 - 12300 nm). The samples were placed on a polymer plate (VNIR+SWIR) or Al plate (MWIR and LWIR) as background at room temperature and were scanned at their polished side. The data type are .dat and .hdr and can be processed with open-source python based toolbox "Hylite". An example Jupyter notebook script for viewing the data is provided for convenience, it can be run on Google Colab without any modification. An average spectrum of each HSI data is also provided.
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Zenodo创建时间：
2026-05-07
