Electron backscatter diffraction patterns from a single crystal silicon wafer

An electron backscatter diffraction (EBSD) dataset of (50, 50) patterns of (480, 480) pixel resolution from a single crystal silicon wafer. The patterns were acquired on a NORDIF UF-1100 detector in a Zeiss Supra 55 VP FEG SEM operated at 20 kV. The working distance was 16.1 mm and the nominal sample tilt was 70\(^{\circ}\). The nominal step size is 40 μm, so the scan covers a nominal area of (2 x 2) μm². The patterns are stored in NORDIF's binary file format (Pattern.dat) with the top-left pixel in the top-left pattern as the first byte, and the bottom-right pixel in the bottom-right pattern as the last byte. The patterns can be opened in for example the open-source Python package kikuchipy (https://github.com/pyxem/kikuchipy) with the following commands: <pre><code class="language-python">import kikuchipy as kp s = kp.load("Pattern.dat")</code></pre>