Dataset - Accelerating Surface Composition Characterization of Thin-Film Materials Libraries using Multi-Output Gaussian Process Regression

This dataset contains the compositional data for a combinatorial thin-film materials library in the Mg-Mn-Al-O system. The library consists of 342 measurement areas characterized by both: Volume composition measured via energy-dispersive X-ray spectroscopy (EDX) in at.% Surface composition measured via X-ray photoelectron spectroscopy (XPS) in at.% Additionally, a coordinates file is included, providing the x-y-position of each measurement area on the library (in mm). All files are supplied in CSV format.