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A set of an STM data produced by LT STM/FM Qplus microscope with STM profile height files. The data were evaluated for publication : Jałochowski, M.; Kwapiński, T. Distribution of Electron Density in Self-Assembled One-Dimensional Chains of Si Atoms. Materials 2023, 16, 6044. https://doi.org/10.3390/ma16176044本数据集为一套由LT STM/FM Qplus型显微镜采集得到的扫描隧道显微镜（Scanning Tunneling Microscope, STM）数据，配套包含STM形貌高度文件。该数据集相关内容曾用于论文《硅原子自组装一维链中的电子密度分布》的发表评审流程，该论文作者为Jałochowski, M.与Kwapiński, T.，发表于期刊*Materials* 2023年第16卷第6044篇文章，DOI链接：https://doi.org/10.3390/ma16176044。