Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
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Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
Jyotish Patidar, Amit Sharma, Siarhei Zhuk, Giacomo Lorenzin, Claudia Cancellieri,Martin F. Sarott, Morgan Trassin, Kerstin Thorwarth, Johann Michler, Sebastian Siol
Surface & Coatings Technology 468 (2023) 129719
https://doi.org/10.1016/j.surfcoat.2023.129719.
创建时间：
2025-04-02
